ReviewSensors (Basel, Switzerland)2015
Piezoelectric micromachined ultrasound transducer (PMUT) arrays for integrated sensing, actuation and imaging.
Review in Sensors (Basel, Switzerland), 2015. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 80 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
80 citing papers in PubMed.
- Advanced methods of wearable ultrasound and photoacoustic imaging devices: A review.Photoacoustics · 2026Article
- Recent advances in transducers for through-tissue ultrasonic power transfer.Progress in biomedical engineering (Bristol, England) · 2026Review
- Skin-conformal PMN-PT ultrasonic sensor for cuffless blood pressure sensing via eutectic solder integration.Microsystems & nanoengineering · 2026Article
- Review of Linear-Array-Transducer-Based Volumetric Ultrasound Imaging Techniques and Their Biomedical Applications.Bioengineering (Basel, Switzerland) · 2025Review
- Multi-Objective Optimization of IME-Based Acoustic Tweezers for Mitigating Node Displacements.Polymers · 2025Article
- Localized Sound-Integrated Display Speaker Using Crosstalk-Free Piezoelectric Vibration Array.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- Biocompatible and Hermetic Encapsulation of PMUTs: Effects of Parylene F-VT4 and ALD Stacks on Membrane Vibration and Acoustic Performance.Sensors (Basel, Switzerland) · 2025Article
- Flexible micromachined ultrasound transducers (MUTs) for biomedical applications.Microsystems & nanoengineering · 2025Review
- MEMS-metasurface-enabled mode-switchable vortex lasers.Science advances · 2024Article
- Non-contact photoacoustic imaging with a silicon photonics-based Laser Doppler Vibrometer.Scientific reports · 2024Article
- A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging.Microsystems & nanoengineering · 2024Article
- Edge treatment for spurious mode suppression in thin-film lithium niobate resonators.Scientific reports · 2024Article
- Tunable dynamical tissue phantom for laser speckle imaging.Biomedical optics express · 2024Article
- Flexible Ultrasonic Transducers for Wearable Biomedical Applications: A Review on Advanced Materials, Structural Designs, and Future Prospects.IEEE transactions on ultrasonics, ferroelectrics, and frequency control · 2024Review
- Clinical, Safety, and Engineering Perspectives on Wearable Ultrasound Technology: A Review.IEEE transactions on ultrasonics, ferroelectrics, and frequency control · 2024Review
- Curved and Annular Diaphragm Coupled Piezoelectric Micromachined Ultrasonic Transducers for High Transmit Biomedical Applications.Sensors (Basel, Switzerland) · 2024Article
- Piezoelectric Micromachined Ultrasonic Transducers with Micro-Hole Inter-Etch and Sealing Process on (111) Silicon Wafer.Micromachines · 2024Article
- Exploiting Sound for Emerging Applications of Extracellular Vesicles.Nano research · 2024Article
- A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer.Micromachines · 2023Article
- Modeling a Fluid-Coupled Single Piezoelectric Micromachined Ultrasonic Transducer Using the Finite Difference Method.Micromachines · 2023Article
20 more citing papers are in PubMed but not listed here.
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
7 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays. This paper presents an overview of the current development status of PMUTs and a discussion of their suitability for miniaturized and integrated devices. The thin film piezoelectric materials required to functionalize these devices are discussed, followed by the microfabrication techniques used to create PMUT elements and the constraints the fabrication imposes on device design. Approaches for electrical interconnection and integration with on-chip electronics are discussed. Electrical and acoustic measurements from fabricated PMUT arrays with up to 320 diaphragm elements are presented. The PMUTs are shown to be broadband devices with an operating frequency which is tunable by tailoring the lateral dimensions of the flexural membrane or the thicknesses of the constituent layers. Finally, the outlook for future development of PMUT technology and the potential applications made feasible by integrated PMUT devices are discussed.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.