ArticleBiomicrofluidics2015
Improving the dielectric properties of an electrowetting-on-dielectric microfluidic device with a low-pressure chemical vapor deposited Si3N4 dielectric layer.
Article in Biomicrofluidics, 2015. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
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Who cites it
8 citing papers in PubMed.
- Inkjet-Printed Dielectric Layer for the Enhancement of Electrowetting Display Devices.Nanomaterials (Basel, Switzerland) · 2024Article
- Identification of Microorganisms Using an EWOD System.Micromachines · 2022Article
- Virtual Stencil for Patterning and Modeling in a Quantitative Volume Using EWOD and DEP Devices for Microfluidics.Micromachines · 2021Article
- Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices.Scientific reports · 2021Article
- Multiscale Interface Effect on Homogeneous Dielectric Structure of ZrO₂/Teflon Nanocomposite for Electrowetting Application.Polymers · 2018Article
- Droplet Velocity Measurement Based on Dielectric Layer Thickness Variation Using Digital Microfluidic Devices.Biosensors · 2018Article
- Article
- Preface to Special Topic: Select Papers from the 8th IEEE International Conference on Nano/Molecular Medicine and Engineering Held in Kaohsiung, Taiwan.Biomicrofluidics · 2015Article
Corrections and comments
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Authors and funding
3 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Dielectric breakdown is a common problem in a digital microfluidic system, which limits its application in chemical or biomedical applications. We propose a new fabrication of an electrowetting-on-dielectric (EWOD) device using Si3N4 deposited by low-pressure chemical vapor deposition (LPCVD) as a dielectric layer. This material exhibits a greater relative permittivity, purity, uniformity, and biocompatibility than polymeric films. These properties also increase the breakdown voltage of a dielectric layer and increase the stability of an EWOD system when applied in biomedical research. Medium droplets with mouse embryos were manipulated in this manner. The electrical properties of the Si3N4 dielectric layer-breakdown voltage, refractive index, relative permittivity, and variation of contact angle with input voltage-were investigated and compared with a traditional Si3N4 dielectric layer deposited as a plasma-enhanced chemical vapor deposition to confirm the potential of LPCVD Si3N4 applied as the dielectric layer of an EWOD digital microfluidic system.
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Registered trials
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