ArticleOptics express2014
High responsivity, low dark current, heterogeneously integrated thin film Si photodetectors on rigid and flexible substrates.
Article in Optics express, 2014. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 6 papers.
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Who cites it
6 citing papers in PubMed.
- High Dynamic Range CsFAPbIMaterials (Basel, Switzerland) · 2026Article
- Intermediate Bandgap (IB) CuNanomaterials (Basel, Switzerland) · 2026Article
- On-chip fluorescence sensing for fluidics platforms using thin film silicon photodetectors.Biomedical optics express · 2020Article
- Methods of extraction of optical properties from diffuse reflectance measurements of ex-vivo human colon tissue using thin film silicon photodetector arrays.Biomedical optics express · 2019Article
- Spatially resolved diffuse reflectance spectroscopy endoscopic sensing with custom Si photodetectors.Biomedical optics express · 2018Article
- Flexible silicon sensors for diffuse reflectance spectroscopy of tissue.Biomedical optics express · 2017Article
Corrections and comments
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Authors and funding
3 authors.
Funding
Abstract
We report thin film single crystal silicon photodetectors (PDs), composed of 13- 25 μm thick silicon, heterogeneously bonded to transparent Pyrex® and flexible Kapton® substrates. The measured responsivity and dark current density of the PDs on pyrex is 0.19 A/W - 0.34 A/W (λ = 470 nm - 600 nm) and 0.63 nA/cm(2), respectively, at ~0V bias. The measured responsivity and dark current density of the flexible PDs is 0.16 A/W - 0.26 A/W (λ = 470 nm - 600 nm) and 0.42 nA/cm(2), respectively, at a ~0V bias. The resulting responsivity-to-dark current density ratios for the reported rigid and flexible PDs are 0.3-0.54 cm(2)/nW and 0.38-0.62 cm(2)/nW, respectively. These are the highest reported responsivity-to-dark current density ratios for heterogeneously bonded thin film single crystal Si PDs, to the best of our knowledge. These PDs are customized for applications in biomedical imaging and integrated biochemical sensing.
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