ArticleNature nanotechnology2014
All-water-based electron-beam lithography using silk as a resist.
Article in Nature nanotechnology, 2014. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 66 papers.
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Who cites it
66 citing papers in PubMed.
- Selective Deposition of Charged Droplets for Programmable and Rewritable Printing of Patterned Microstructure Arrays.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2026Article
- Nanostructured Protein Surfaces Inspired by Spider Silk.Advanced materials (Deerfield Beach, Fla.) · 2025Review
- Pollen-inspired biopolymer-based multifunctional films.Proceedings of the National Academy of Sciences of the United States of America · 2025Article
- Interference Field Control for High-Uniformity Nanopatterning: A Review.Sensors (Basel, Switzerland) · 2025Review
- Vegetative and microbial proteins for bioplastics applications - a review in the indian context.RSC advances · 2025Review
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- Two-dimensional silk.Science advances · 2024Article
- Self-Assembled Block Copolymers as a Facile Pathway to Create Functional Nanobiosensor and Nanobiomaterial Surfaces.Polymers · 2024Review
- Design and Development of Transient Sensing Devices for Healthcare Applications.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2024Review
- Multi- and Gray-Scale Thermal Lithography of Silk Fibroin as Water-Developable Resist for Micro and Nanofabrication.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2024Article
- Reusable Colorimetric Biosensors on Sustainable Silk-Based Platforms.ACS applied bio materials · 2024Article
- Creating tunable lateral optical forces through multipolar interplay in single nanowires.Nature communications · 2023Article
- Self-aligned patterning of tantalum oxide on Cu/SiONature communications · 2023Article
- Kinetic Analysis Reveals the Role of Secondary Nucleation in Regenerated Silk Fibroin Self-Assembly.Biomacromolecules · 2023Article
- A brief review on the mechanisms and approaches of silk spinning-inspired biofabrication.Frontiers in bioengineering and biotechnology · 2023Review
- Bioinspired silk fibroin materials: From silk building blocks extraction and reconstruction to advanced biomedical applications.Materials today. Bio · 2022Review
- Resist nanokirigami for multipurpose patterning.National science review · 2022Article
- Application and prospects of high-throughput screening forWorld journal of stem cells · 2022Review
- Photonic crystal L3 cavity laser fabricated using maskless digital photolithography.Nanophotonics (Berlin, Germany) · 2022Article
6 more citing papers are in PubMed but not listed here.
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Authors and funding
9 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Traditional nanofabrication techniques often require complex lithographic steps and the use of toxic chemicals. To move from the laboratory scale to large scales, nanofabrication should be carried out using alternative procedures that are simple, inexpensive and use non-toxic solvents. Recent efforts have focused on nanoimprinting and the use of organic resists (such as quantum dot-polymer hybrids, DNA and poly(ethylene glycol)), which still require, for the most part, noxious chemicals for processing. Significant advances have been achieved using 'green' resists that can be developed with water, but so far these approaches have suffered from low electron sensitivity, line edge roughness and scalability constraints. Here, we present the use of silk as a natural and biofunctional resist for electron-beam lithography. The process is entirely water-based, starting with the silk aqueous solution and ending with simple development of the exposed silk film in water. Because of its polymorphic crystalline structure, silk can be used either as a positive or negative resist through interactions with an electron beam. Moreover, silk can be easily modified, thereby enabling a variety of 'functional resists', including biologically active versions. As a proof of principle of the viability of all-water-based silk electron-beam lithography (EBL), we fabricate nanoscale photonic lattices using both neat silk and silk doped with quantum dots, green fluorescent proteins (GFPs) or horseradish peroxidase (HRP).
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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.