ArticleProceedings of the National Academy of Sciences of the United States of America2013
High-performance, low-voltage electroosmotic pumps with molecularly thin silicon nanomembranes.
Article in Proceedings of the National Academy of Sciences of the United States of America, 2013. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 14 papers.
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Who cites it
14 citing papers in PubMed.
- Integrating Low-Voltage Microfluidics With On-Chip Electrospray Ionization for Miniaturized Protein Analysis.Small methods · 2026Review
- Closed-Loop Bioelectronic Artificial Pancreas Patch for Continuous Monitoring and Regulation of Blood Glucose in Diabetic Rats and Pigs.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- Connected Droplet Shape Analysis for Nanoflow Quantification in Thin Electroosmotic Micropumps and a Tunable Convex Lens Application.Langmuir : the ACS journal of surfaces and colloids · 2023Article
- Usefulness of direct intratumoral administration of doxorubicin hydrochloride with an electro-osmosis-assisted pump.Frontiers in drug delivery · 2023Article
- State of the art in nonthermal plasma processing for biomedical applications: Can it help fight viral pandemics like COVID-19?Plasma processes and polymers (Print) · 2021Review
- Neuromodulation using electroosmosis.Journal of neural engineering · 2021Article
- Silicon Nanomembrane Filtration and Imaging for the Evaluation of Microplastic Entrainment along a Municipal Water Delivery Route.Sustainability · 2020Article
- A Performance-enhanced Electroosmotic Pump with Track-etched Polycarbonate Membrane by Allylhydridopolycarbosilane Coating.Analytical sciences : the international journal of the Japan Society for Analytical Chemistry · 2020Article
- Microvascular Mimetics for the Study of Leukocyte-Endothelial Interactions.Cellular and molecular bioengineering · 2020Article
- A Fully Integrated In Vitro Diagnostic Microsystem for Pathogen Detection Developed Using a "3D Extensible" Microfluidic Design Paradigm.Micromachines · 2019Article
- TEM Tomography of Pores with Application to Computational Nanoscale Flows in Nanoporous Silicon Nitride (NPN).Membranes · 2018Article
- Finite element modeling to analyze TEER values across silicon nanomembranes.Biomedical microdevices · 2018Article
- Modification of Nanoporous Silicon Nitride with Stable and Functional Organic Monolayers.Chemistry of materials : a publication of the American Chemical Society · 2017Article
- Highly permeable silicon membranes for shear free chemotaxis and rapid cell labeling.Lab on a chip · 2014Article
Corrections and comments
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Authors and funding
8 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
We have developed electroosmotic pumps (EOPs) fabricated from 15-nm-thick porous nanocrystalline silicon (pnc-Si) membranes. Ultrathin pnc-Si membranes enable high electroosmotic flow per unit voltage. We demonstrate that electroosmosis theory compares well with the observed pnc-Si flow rates. We attribute the high flow rates to high electrical fields present across the 15-nm span of the membrane. Surface modifications, such as plasma oxidation or silanization, can influence the electroosmotic flow rates through pnc-Si membranes by alteration of the zeta potential of the material. A prototype EOP that uses pnc-Si membranes and Ag/AgCl electrodes was shown to pump microliter per minute-range flow through a 0.5-mm-diameter capillary tubing with as low as 250 mV of applied voltage. This silicon-based platform enables straightforward integration of low-voltage, on-chip EOPs into portable microfluidic devices with low back pressures.
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