ArticleScientific reports2013
Fast-response, sensitivitive and low-powered chemosensors by fusing nanostructured porous thin film and IDEs-microheater chip.
Article in Scientific reports, 2013. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 17 papers.
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Who cites it
17 citing papers in PubMed.
- Antimony-contact MoSMicrosystems & nanoengineering · 2026Article
- Wafer-Level Self-Assembly and Interface Passivation Patterning Technology for Nanomaterial-Compatible 3D MEMS Sensing Chips.Nano-micro letters · 2026Article
- Semiconductor Gas Sensors for Detecting Chemical Warfare Agents and Their Simulants.Sensors (Basel, Switzerland) · 2023Review
- Metal oxide semiconducting nanomaterials for air quality gas sensors: operating principles, performance, and synthesis techniques.Mikrochimica acta · 2022Review
- Microheater: material, design, fabrication, temperature control, and applications-a role in COVID-19.Biomedical microdevices · 2021Review
- Fabrication of Highly Porous and Pure Zinc Oxide Films Using Modified DC Magnetron Sputtering and Post-Oxidation.Materials (Basel, Switzerland) · 2021Article
- Optimization of a Low-Power Chemoresistive Gas Sensor: Predictive Thermal Modelling and Mechanical Failure Analysis.Sensors (Basel, Switzerland) · 2021Article
- Nanoarchitectonics for Wide Bandgap Semiconductor Nanowires: Toward the Next Generation of Nanoelectromechanical Systems for Environmental Monitoring.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2020Review
- Long-Term Performance Assessment of Low-Cost Atmospheric Sensors in the Arctic Environment.Sensors (Basel, Switzerland) · 2020Article
- Gas sensors using ordered macroporous oxide nanostructures.Nanoscale advances · 2019Review
- Ultrafine nanoparticles of W-doped SnORSC advances · 2019Article
- Sensing Technologies for Detection of Acetone in Human Breath for Diabetes Diagnosis and Monitoring.Diagnostics (Basel, Switzerland) · 2018Review
- Preparation, Characterization and Application of Polysaccharide-Based Metallic Nanoparticles: A Review.Polymers · 2017Review
- Article
- The Electrostatically Formed Nanowire: A Novel Platform for Gas-Sensing Applications.Sensors (Basel, Switzerland) · 2017Review
- In-Situ Testing of the Thermal Diffusivity of Polysilicon Thin Films.Micromachines · 2016Article
- Demonstration of fast and accurate discrimination and quantification of chemically similar species utilizing a single cross-selective chemiresistor.Analytical chemistry · 2014Article
Corrections and comments
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Authors and funding
9 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
The chemiresistive thin film gas sensors with fast response, high sensitivity, low power consumption and mass-produced potency, have been expected for practical application. It requires both sensitive materials, especially exquisite nanomaterials, and efficient substrate chip for heating and electrical addressing. However, it is challenging to achieve repeatable microstructures across the films and low power consumption of substrate chip. Here we presented a new sensor structure via the fusion of metal-oxide nanoporous films and micro-electro-mechanical systems (MEMS)-based sensing chip. An interdigital-electrodes (IDEs) and microheater integrated MEMS structure is designed and employed as substrate chip to in-situ fabricate colloidal monolayer template-induced metal-oxide (egg. SnO2) nanoporous sensing films. This fused sensor demonstrates mW-level low power, ultrafast response (~1 s), and parts-per-billion lever detection for ethanol gas. Due to the controllable template strategy and mass-production potential, such micro/nano fused high-performance gas sensors will be next-generation key miniaturized/integrated devices for advanced practical applications.
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