ArticleSensors (Basel, Switzerland)2012
Two dimensional array of piezoresistive nanomechanical Membrane-type Surface Stress Sensor (MSS) with improved sensitivity.
Article in Sensors (Basel, Switzerland), 2012. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 18 papers.
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Who cites it
18 citing papers in PubMed.
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- An Analytical Model of Sorption-Induced Static Mode Nanomechanical Sensing for Multicomponent Analytes.Analytical chemistry · 2025Article
- Investigation towards nanomechanical sensor array for real-time detection of complex gases.Microsystems & nanoengineering · 2025Article
- Scalable fabrication of precise flexible strain sensors using organic semiconductor single crystals.Science and technology of advanced materials · 2025Article
- Sensing signal augmentation by flow rate modulation of carrier gas for accurate differentiation of complex odours.Science and technology of advanced materials · 2024Article
- Measurement of Volatile Fatty Acids in Silage through Odors with Nanomechanical Sensors.Biosensors · 2023Article
- Detection of Trace Amounts of Water in Organic Solvents by DNA-Based Nanomechanical Sensors.Biosensors · 2022Article
- Recent Advances in Nanomechanical Membrane-Type Surface Stress Sensors towards Artificial Olfaction.Biosensors · 2022Review
- Odor-Based Nanomechanical Discrimination of Fuel Oils Using a Single Type of Designed Nanoparticles with Nonlinear Viscoelasticity.ACS omega · 2021Article
- Statistical Evaluation of Total Expiratory Breath Samples Collected throughout a Year: Reproducibility and Applicability toward Olfactory Sensor-Based Breath Diagnostics.Sensors (Basel, Switzerland) · 2021Article
- Determination of quasi-primary odors by endpoint detection.Scientific reports · 2021Article
- Development of a Mobile Device for Odor Identification and Optimization of Its Measurement Protocol Based on the Free-Hand Measurement.Sensors (Basel, Switzerland) · 2020Article
- Finite Element Analysis of Interface Dependence on Nanomechanical Sensing.Sensors (Basel, Switzerland) · 2020Article
- Preparation and Characterization of Freely-Suspended Graphene Nanomechanical Membrane Devices with Quantum Dots for Point-of-Care Applications.Micromachines · 2020Article
- Free-hand gas identification based on transfer function ratios without gas flow control.Scientific reports · 2019Article
- Effects of Center Metals in Porphines on Nanomechanical Gas Sensing.Sensors (Basel, Switzerland) · 2018Article
- Data-driven nanomechanical sensing: specific information extraction from a complex system.Scientific reports · 2017Article
- Finite Element Analysis on Nanomechanical Detection of Small Particles: Toward Virus Detection.Frontiers in microbiology · 2016Article
Corrections and comments
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Authors and funding
9 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
We present a new generation of piezoresistive nanomechanical Membrane-type Surface stress Sensor (MSS) chips, which consist of a two dimensional array of MSS on a single chip. The implementation of several optimization techniques in the design and microfabrication improved the piezoresistive sensitivity by 3~4 times compared to the first generation MSS chip, resulting in a sensitivity about ~100 times better than a standard cantilever-type sensor and a few times better than optical read-out methods in terms of experimental signal-to-noise ratio. Since the integrated piezoresistive read-out of the MSS can meet practical requirements, such as compactness and not requiring bulky and expensive peripheral devices, the MSS is a promising transducer for nanomechanical sensing in the rapidly growing application fields in medicine, biology, security, and the environment. Specifically, its system compactness due to the integrated piezoresistive sensing makes the MSS concept attractive for the instruments used in mobile applications. In addition, the MSS can operate in opaque liquids, such as blood, where optical read-out techniques cannot be applied.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.