ArticleNanoscale research letters2012
Multilayer porous silicon diffraction gratings operating in the infrared.
Article in Nanoscale research letters, 2012. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
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Who cites it
3 citing papers in PubMed.
- Optical Modulation of the Diffraction Efficiency in an Indoline Azobenzene/Amorphous Polycarbonate Film.Nanoscale research letters · 2016Article
- Optical characterization of porous silicon monolayers decorated with hydrogel microspheres.Nanoscale research letters · 2014Article
- Released micromachined beams utilizing laterally uniform porosity porous silicon.Nanoscale research letters · 2014Article
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Authors and funding
5 authors.
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Abstract
Transmission diffraction gratings operating at 1,565 nm based on multilayer porous silicon films are modeled, fabricated, and tested. Features down to 2 μm have been patterned into submicron-thick mesoporous films using standard photolithographic and dry etching techniques. After patterning of the top porous film, a second anodization can be performed, allowing an under-layer of highly uniform porosity and thickness to be achieved. High transmission greater than 40% is measured, and modeling results suggest that a change in diffraction efficiency of 1 dB for a 1% change in normalized refractive index can be achieved. Preliminary measurement of solvent vapor shows a large signal change from the grating sensor in agreement with models.
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Registered trials
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