ArticleJournal of micro/nanolithography, MEMS, and MOEMS : JM32010
Micropore and nanopore fabrication in hollow antiresonant reflecting optical waveguides.
Article in Journal of micro/nanolithography, MEMS, and MOEMS : JM3, 2010. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
7 citing papers in PubMed.
- 3D-Nanoprinted Antiresonant Hollow-Core Microgap Waveguide: An on-Chip Platform for Integrated Photonic Devices and Sensors.ACS photonics · 2022Article
- Recent advances in integrated solid-state nanopore sensors.Lab on a chip · 2021Review
- On demand delivery and analysis of single molecules on a programmable nanopore-optofluidic device.Nature communications · 2019Article
- Optofluidic devices with integrated solid-state nanopores.Mikrochimica acta · 2016Article
- Electro-optical detection of single λ-DNA.Chemical communications (Cambridge, England) · 2015Article
- Effect of fabrication-dependent shape and composition of solid-state nanopores on single nanoparticle detection.ACS nano · 2013Article
- Optofluidic Microsystems for Chemical and Biological Analysis.Nature photonics · 2011Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
6 authors.
Funding
Abstract
We demonstrate the fabrication of micropore and nanopore features in hollow antiresonant reflecting optical waveguides to create an electrical and optical analysis platform that can size select and detect a single nanoparticle. Micropores (4 μm diameter) are reactive-ion etched through the top SiO(2) and SiN layers of the waveguides, leaving a thin SiN membrane above the hollow core. Nanopores are formed in the SiN membranes using a focused ion-beam etch process that provides control over the pore size. Openings as small as 20 nm in diameter are created. Optical loss measurements indicate that micropores did not significantly alter the loss along the waveguide.
Identifiers
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.