ArticleJournal of micromechanics and microengineering : structures, devices, and systems2010
Optimized piranha etching process for SU8-based MEMS and MOEMS construction.
Article in Journal of micromechanics and microengineering : structures, devices, and systems, 2010. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 9 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
9 citing papers in PubMed.
- Exceptional Mineral Scaling Resistance from the Surface Gas Layer: Impacts of Surface Wetting Properties and the Gas Layer Charging Mechanism.ACS environmental Au · 2022Article
- Scalable Spatial-Spectral Multiplexing of Single-Virus Detection Using Multimode Interference Waveguides.Scientific reports · 2017Article
- Liquid Core ARROW Waveguides: A Promising Photonic Structure for Integrated Optofluidic Microsensors.Micromachines · 2016Review
- Integration of programmable microfluidics and on-chip fluorescence detection for biosensing applications.Biomicrofluidics · 2014Article
- Tailorable integrated optofluidic filters for biomolecular detection.Lab on a chip · 2011Article
- Hollow waveguides with low intrinsic photoluminescence fabricated with Ta(2)O(5) and SiO(2) films.Applied physics letters · 2011Article
- Optofluidic tunable microlens by manipulating the liquid meniscus using a flared microfluidic structure.Biomicrofluidics · 2010Article
- Enhancement of ARROW Photonic Device Performance via Thermal Annealing of PECVD-based SiOIEEE journal of selected topics in quantum electronics : a publication of the IEEE Lasers and Electro-optics SocietyArticle
- Signal-to-noise Enhancement in Optical Detection of Single Viruses with Multi-spot Excitation.IEEE journal of selected topics in quantum electronics : a publication of the IEEE Lasers and Electro-optics SocietyArticle
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
5 authors.
Funding
Abstract
We demonstrate the optimization of the concentration, temperature and cycling of a piranha (H(2)O(2):H(2)SO(4)) mixture that produces high yields while quickly etching hollow structures made using a highly crosslinked SU8 polymer sacrificial core. The effects of the piranha mixture on the thickness, refractive index and roughness of common micro-electromechanical systems and micro-opto-electromechanical systems fabrication materials (SiN, SiO(2) and Si) were determined. The effectiveness of the optimal piranha mixture was demonstrated in the construction of hollow anti-resonant reflecting optical waveguides.
Identifiers
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.