ArticleOptics express2010
A versatile diffractive maskless lithography for single-shot and serial microfabrication.
Article in Optics express, 2010. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 6 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
6 citing papers in PubMed.
- Holographic Whole-Object Photopolymerization Preserving Director Alignment in Liquid Crystalline Actuators.Advanced materials (Deerfield Beach, Fla.) · 2026Article
- Metasurface-enabled polarization-independent LCoS spatial light modulator for 4K resolution and beyond.Light, science & applications · 2023Article
- Rapid, continuous projection multi-photon 3D printing enabled by spatiotemporal focusing of femtosecond pulses.Light, science & applications · 2021Article
- Rapid Fabrication of Continuous Surface Fresnel Microlens Array by Femtosecond Laser Focal Field Engineering.Micromachines · 2020Article
- One-step volumetric additive manufacturing of complex polymer structures.Science advances · 2017Article
- Fabrication of microscale medical devices by two-photon polymerization with multiple foci via a spatial light modulator.Biomedical optics express · 2011Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
5 authors.
Funding
Abstract
We demonstrate a diffractive maskless lithographic system that is capable of rapidly performing both serial and single-shot micropatterning. Utilizing the diffractive properties of phase holograms displayed on a spatial light modulator, arbitrary intensity distributions were produced to form two and three dimensional micropatterns/structures in a variety of substrates. A straightforward graphical user interface was implemented to allow users to load templates and change patterning modes within the span of a few minutes. A minimum resolution of approximately 700 nm is demonstrated for both patterning modes, which compares favorably to the 232 nm resolution limit predicted by the Rayleigh criterion. The presented method is rapid and adaptable, allowing for the parallel fabrication of microstructures in photoresist as well as the fabrication of protein microstructures that retain functional activity.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.